AFM Calibration Samples

AFM Calibration Sample
AFM Calibration Sample
AFM Calibration Sample
AFM Calibration Sample
CalibSEM
sem2
AFM Calibration Sample
AFM Calibration Sample
AFM Calibration Sample
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Calibration Grating – flexCG120

 

The flexCG120 test grating with its truly 3-Dimensional structure is intended for simultaneous calibration in X-, Y- and Z-direction, lateral calibration of SPM scanners and detection of any lateral nonlinearity, hysteresis, creep and cross-coupling effects.
Structure:
Pattern type:
Height:
Square size:
Period:
Chip size:
Effective area:		 Si wafer with SiO2 layer for grating
3-Dimensional array of small squares
120 ±1.5nm
2µm
4µm
5 x 5 x 0.5mm
Central square of 3 x 3mm

 

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